Chemical mechanical polishing slurry composition and method of polishing metal layer

ABSTRACT

A CMP slurry composition and a method of polishing a metal layer are provided. In some embodiments, the CMP slurry composition includes about 0.1 to 10 parts by weight of a metal oxide, and about 0.1 to 10 parts by weight of a chelator. The chelator includes a thiol compound or a thiolether compound.

CROSS-REFERENCE TO RELATED APPLICATION

This application claims the priority benefit of U.S. provisionalapplication Ser. No. 62/928,312, filed on Oct. 30, 2019. The entirety ofthe above-mentioned patent application is hereby incorporated byreference herein and made a part of this specification.

BACKGROUND

The semiconductor integrated circuit (IC) industry has experiencedexponential growth. Technological advances in IC materials and designhave produced generations of ICs where each generation has smaller andmore complex circuits than the previous generation. In the course of ICevolution, functional density (i.e., the number of interconnecteddevices per chip area) has generally increased while geometry size(i.e., the smallest component (or line) that can be created using afabrication process) has decreased. This scaling down process generallyprovides benefits by increasing production efficiency and loweringassociated costs.

Such scaling down has also increased the complexity of processing andmanufacturing ICs and, for these advances to be realized, similardevelopments in IC processing and manufacturing are needed. For example,some transition metal elements such as ruthenium (Ru) become importantmaterials because their superior features of low resistance under smallcross-sectional area and barrier-less adhesion ability. Although thesetransition metal elements provide great electrical properties, theirinert characteristics such as higher hardness make them difficult toprocess, specifically in a chemical mechanical polishing (CMP) process.

BRIEF DESCRIPTION OF THE DRAWINGS

Aspects of the present disclosure are best understood from the followingdetailed description when read with the accompanying figures. It isnoted that, in accordance with the standard practice in the industry,various features are not drawn to scale. In fact, the criticaldimensions of the various features may be arbitrarily increased orreduced for clarity of discussion.

FIG. 1 to FIG. 7 are schematic cross-sectional views of a method ofpolishing a metal layer in accordance with some embodiments.

FIG. 8 is a process flow of a method of polishing a metal layer inaccordance with some embodiments.

FIG. 9 is a process flow of a method of polishing a metal layer inaccordance with alternative embodiments.

DETAILED DESCRIPTION

The following disclosure provides many different embodiments, orexamples, for implementing different features of the provided subjectmatter. Specific examples of components and arrangements are describedbelow to simplify the present disclosure. These are, of course, merelyexamples and are not intended to be limiting. For example, the formationof a second feature over or on a first feature in the description thatfollows may include embodiments in which the second and first featuresare formed in direct contact, and may also include embodiments in whichadditional features may be formed between the second and first features,such that the second and first features may not be in direct contact. Inaddition, the present disclosure may repeat reference numerals and/orletters in the various examples. This repetition is for the purpose ofsimplicity and clarity and does not in itself dictate a relationshipbetween the various embodiments and/or configurations discussed.

Further, spatially relative terms, such as “beneath”, “below”, “lower”,“on”, “over”, “overlying”, “above”, “upper” and the like, may be usedherein for ease of description to describe one element or feature'srelationship to another element(s) or feature(s) as illustrated in thefigures. The spatially relative terms are intended to encompassdifferent orientations of the device in use or operation in addition tothe orientation depicted in the figures. The apparatus may be otherwiseoriented (rotated 90 degrees or at other orientations) and the spatiallyrelative descriptors used herein may likewise be interpretedaccordingly.

FIG. 1 to FIG. 7 are schematic cross-sectional views of a method ofpolishing a metal layer in accordance with some embodiments. Thefollowing embodiments in which the method of the disclosure is appliedto a process of forming a fin field-effect transistor (FinFET) deviceare provided for illustration purposes, and are not construed aslimiting the present disclosure. In other embodiments, the method of thedisclosure may be applied to a process of forming a planar device or agate-all-around (GAA) device.

Referring to FIG. 1, a substrate 100 with one or more fins 102 isprovided. In some embodiments, the substrate 100 includes asilicon-containing substrate, a silicon-on-insulator (SOI) substrate, ora substrate formed of other suitable semiconductor materials. Dependingon the requirements of design, the substrate 100 may be an N-typesubstrate or a P-type substrate and may have doped regions therein. Thedoped regions may be configured for an N-type FinFET device or a P-typeFinFET device. In some embodiments, the substrate 100 has an isolationlayer formed thereon. Specifically, the isolation layer covers lowerportions of the fins 102 and exposes upper portions of the fins 102. Insome embodiments, the isolation layer is a shallow trench isolation(STI) structure.

In some embodiments, the substrate 100 has multiple gate structures 117formed thereon, strained layers 106 formed therein, metal stacks betweenthe gate structures 117, and a zeroth dielectric layer 122 formed asidethe gate structures 117 and over the strained layers 106. In someembodiments, each of the gate structures 117 includes a gate electrode112, a gate dielectric layer 110 between the gate electrode 112 and thesubstrate 100, a spacer 104 on the sidewall of the gate electrode 112,an etching stop layer 108 between the spacer 104 and the zerothdielectric layer 122, and a dielectric helmet 116 over the gateelectrode 112.

In some embodiments, the method of forming the intermediate structure ofFIG. 1 includes forming multiple dummy gate strips across the fins 102,forming spacers 104 on the sidewalls of the dummy gate strips, formingstrained layers 106 at two sides of each fin 102, forming a sacrificialdielectric layer aside the dummy gate strips and over the strainedlayers 106, and replacing the dummy gate strips with metal gate strips.

In some embodiments, the dummy gate strips include a silicon-containingmaterial, such as polysilicon, amorphous silicon or a combinationthereof. In some embodiments, the dummy gate strips extend in adirection different from (e.g., perpendicular to) the extendingdirection of the fins 102.

In some embodiments, the spacers 104 include a nitrogen-containingdielectric material, a carbon-containing dielectric material or both,and the spacers 104 include a low-k material having a dielectricconstant less than about 4 or about 3.5.

In some embodiments, the strained layers 106 include silicon carbon(SiC), silicon phosphate (SiP), SiCP or a SiC/SiP multi-layer structurefor an N-type FinFET device. In alternative embodiments, the strainedlayers 106 include silicon germanium (SiGe) for a P-type FinFET device.In some embodiments, the strained layers 106 can be referred to as“source/drain regions”.

In some embodiments, the sacrificial dielectric layer includes nitridesuch as silicon nitride, oxide such as silicon oxide, phosphosilicateglass (PSG), borosilicate glass (BSG), boron-doped phosphosilicate glass(BPSG), the like, or a combination thereof. In some embodiments, anetching stop layer 108 is formed after the step of forming the strainedlayers 106 and before the step of forming the sacrificial dielectriclayer. In some embodiments, the etching stop layer 108 includes SiN, SiCor the like. In some embodiments, the etching stop layer 108 is referredto as “contact etching stop layers (CESL)”. In some embodiments, the topsurface of the sacrificial dielectric layer is substantially level withthe top surfaces of the dummy gate strips.

Thereafter, the dummy gate strips are replaced with metal gate strips.In some embodiments, the dummy gate strips are removed to form gatetrenches in the sacrificial dielectric layer, and the metal gate stripsare then formed in the gate trenches. In some embodiments, the topsurface of the sacrificial dielectric layer is substantially level withthe top surfaces of the metal gate strips.

In some embodiments, each of the metal gate strips includes a gatedielectric layer 110 and a gate electrode 112 (or called “replacementgate”) on the gate dielectric layer 110. In some embodiments, the metalgate strips extend in a direction different from (e.g., perpendicularto) the extending direction of the fins 102. In some embodiments, eachof the gate dielectric layers 110 surrounds the sidewall and bottom ofthe corresponding gate electrode 112 and on the top and sidewall of thecorresponding fin 102, as shown in FIG. 1. In some embodiments,interfacial layers such as silicon oxide layers are formed between thefins 102 and the gate dielectric layers 110.

In some embodiments, the gate dielectric layers 110 include a high-kmaterial having a dielectric constant greater than about 10. In someembodiments, the high-k material includes metal oxide, such as ZrO₂,Gd₂O₃, HfO₂, BaTiO₃, Al₂O₃, LaO₂, TiO₂, Ta₂Os, Y₂O₃, STO, BTO, BaZrO,HfZrO, HfLaO, HfTaO, HfTiO, the like, or a combination thereof. In someembodiments, the gate dielectric layers 110 can optionally include asilicate such as HfSiO, LaSiO, AlSiO, the like, or a combinationthereof.

In some embodiments, each of the gate electrodes 112 includes a workfunction metal layer and a fill metal layer on the work function metallayer. In some embodiments, the work function metal layer is an N-typework function metal layer to provide a gate electrode that properlyperforms in an N-type FinFET device. The N-type work function metallayer may include TiAl, TiAlN, TiAlC, TaAl, TaAlC, TaAlN, TaCN, thelike, or a combination thereof. In alternative embodiments, the workfunction metal layer is a P-type work function metal layer to provide agate electrode that properly performs in a P-type FinFET device. TheP-type work function metal layer may include TiN, WN, TaN, the like, ora combination thereof. The fill metal layer includes copper (Cu),aluminum (Al), tungsten (W), or a suitable material. In someembodiments, each of the gate electrodes 112 can further include a linerlayer, an interface layer, a seed layer, an adhesion layer, a barrierlayer, the like, or a combination thereof.

In some embodiments, the method of forming the intermediate structure ofFIG. 1 further includes partially removing the metal gate strips, thespacers 104 and the etching stop layer 108 to form T-shaped gateopenings in the sacrificial dielectric layer, forming dielectric helmets116 in the T-shaped gate openings, removing the sacrificial dielectriclayer, forming metal stacks 118 between the remaining metal gate strips,and forming a zeroth dielectric layer 122 around the remaining metalgate strips.

In some embodiments, the dielectric helmets 116 include a metal oxide, ametal nitride, a nitride, a silicon-containing material or a combinationthereof. The metal oxide may include ZrO₂, HfO₂, TiO₂, Al₂O₃ or thelike. The metal nitride may include ZrN, HfN, TiN, MN or the like. Thenitride may include silicon nitride. The silicon-containing materialincludes polysilicon, amorphous silicon or a combination thereof. Insome embodiments, the dielectric helmets 116 serve as “polishing stoplayers”, which will be described in details below.

In some embodiments, optional shielding layers 114 are respectivelyformed between the gate electrodes 112 and the dielectric helmets 116.In some embodiments, the shielding layers 114 include metal such astungsten (W), cobalt (Co), copper (Cu), titanium (Ti) or the like. Theshielding layers 114 are configured to protect the gate electrodes 112from being damaged by the subsequent processes. In some embodiments, theshielding layers 114 are referred to as “contact etching stop layers(CESL)”.

In some embodiments, the sacrificial dielectric layer and a portion ofthe etching stop layer 108 are removed to form gaps that expose thestrained layers 106. The metal stacks 118 are formed in the lowerportions of the gaps. In some embodiments, the top surfaces of the metalstacks 118 are substantially coplanar with the top surfaces of the gateelectrodes 112. In some embodiments, the metal stacks 126 include metalsuch as tungsten (W), cobalt (Co), copper (Cu), titanium (Ti) or thelike.

In some embodiments, the zeroth dielectric layer 122 includes nitridesuch as silicon nitride, oxide such as silicon oxide, phosphosilicateglass (PSG), borosilicate glass (BSG), boron-doped phosphosilicate glass(BPSG), the like, or a combination thereof. In some embodiments, azeroth dielectric material layer is formed on the substrate 100 fillingthe gaps between the gate structures 117 by a suitable technique such asspin-coating, CVD, ALD, the like, or a combination thereof. Thereafter,the zeroth dielectric material layer is planarized by a suitabletechnique such as CMP, until tops of the gate structures 117 areexposed. In some embodiments, the top surface of the zeroth dielectriclayer 122 is substantially level with the top surfaces of the dielectrichelmets 116 of the gate structures 117. In some embodiments, the zerothdielectric layer 122 serves as a “polishing stop layer”, which will bedescribed in details below.

In some embodiments, optional shielding layers 120 are respectivelyformed between the metal stacks 118 and the zeroth dielectric layer 122.In some embodiments, the shielding layers 120 include metal such astungsten (W), cobalt (Co), copper (Cu), titanium (Ti) or the like. Theshielding layers 120 are configured to protect the metal stacks 118 frombeing damaged by the subsequent processes. In some embodiments, theshielding layers 120 are referred to as “contact etching stop layers(CESL)”.

Referring to FIG. 2, a first dielectric layer 124 is formed over thezeroth dielectric layer 122. In some embodiments, the first dielectriclayer 124 is blanket-formed on the substrate 100 and in physical contactwith the dielectric helmets 116 and the zeroth dielectric layer 122. Insome embodiments, the first dielectric layer 124 includes SiN, SiCN,SiON, SiOCN, SiOC, SiC, the like, or a combination thereof. In someembodiments, the method of forming the first dielectric layer 124includes performing a suitable technique such as spin-coating, CVD, ALD,the like, or a combination thereof. In some embodiments, the firstdielectric layer 124 serves as a “polishing stop layer”, which will bedescribed in details below.

Thereafter, a second dielectric layer 126 is formed over the firstdielectric layer 124. In some embodiments, the second dielectric layer126 is blanket-formed on the first dielectric layer 124. In someembodiments, the second dielectric layer 126 includes nitride such assilicon nitride, oxide such as silicon oxide, phosphosilicate glass(PSG), borosilicate glass (BSG), boron-doped phosphosilicate glass(BPSG), the like, or a combination thereof. In some embodiments, themethod of forming the second dielectric layer 126 includes performing asuitable technique such as spin-coating, CVD, ALD, the like, or acombination thereof. In some embodiments, the second dielectric layer126 serves as a “polishing stop layer”, which will be described indetails below.

In some embodiments, the second dielectric layer 126 includes a materialsimilar to the zeroth dielectric layer 122 but different from that ofthe first dielectric layer 124. In some embodiments, the polishing rateof the material included in the second dielectric layer 126 is similarto the polishing rate of the material included in the zeroth dielectriclayer 122 but different from the polishing rate of the material includedin the first dielectric layer 124.

Referring to FIG. 3, the second dielectric layer 126, the firstdielectric layer 124 and the zeroth dielectric layer 122 are patternedor partially removed, so as to form at least one opening 128corresponding to one or more of the strained layers 106. In someembodiments, the opening 128 penetrates through the second dielectriclayer 126, the first dielectric layer 124 and the zeroth dielectriclayer 122 and exposes two shielding layers 120. In some embodiments, thepatterning step includes forming a mask layer over the second dielectriclayer 126, and performing an etching process (e.g., dry etching process)by using the mask layer as an etching mask. In some embodiments, theopening 128 has a main trench and multiple holes (or called “contacthole”) protruding from the main trench.

Referring to FIG. 4, a metal layer 130 is formed over the substrate 100filling in the opening 128. In some embodiments, the metal layer 130includes a metal material with suitable resistance and gap-fillcapability. In some embodiments, the metal layer 130 includes atransition metal element with low resistance and barrier-less adhesionability. In some embodiments, the metal layer 130 includes RuCo, RuW,Ru, Mo, Rh or Ir. In some embodiments, the Ru atom content of the metallayer 130 ranges from about 10 at % to 100 at %. In some embodiments,the method of forming the metal layer 130 includes performingsputtering, CVD, electrochemical plating (ECP), the like, or acombination thereof.

Referring to FIG. 5, a first polishing operation P1 is performed with afirst polishing slurry composition, until the top surface of the seconddielectric layer 126 is exposed. In some embodiments, the firstpolishing operation P1 is performed by using the second dielectric layer126 as a polishing stop layer. In some embodiments, the first polishingoperation P1 is configured to polish a Ru-based material or the like byusing an oxide-based material as a polishing stop layer.

In some embodiments, the first polishing slurry composition includesabout 0.1 to 10 parts by weight of a metal oxide, and about 0.1 to 10parts by weight of an oxidizer. In some embodiments, the metal oxideserves as an abrasive and includes TiO₂ in an amount of about 1 to 5parts by weight. In some embodiments, the oxidizer serves as a polishingaccelerator and includes H₂O₂, KIO₃, KIO₄, KClO₃, KClO₄ or a combinationthereof, in an amount of about 1 to 5 parts by weight.

In some embodiments, the first polishing slurry composition furtherincludes about 0.1 to 10 parts by weight of a pH adjustor. In someembodiments, the pH adjustor includes KOH or R₁—N—R₂, wherein R₁ and R₂each independently represent hydrogen, substituted or unsubstitutedC₁-C₁₅ alkyl, substituted or unsubstituted C₁-C₁₅ alkoxyl or substitutedor unsubstituted C₆-C₃₀ aryl, in an amount of about 1 to 5 parts byweight. In some embodiments, the pH value of the first polishing slurrycomposition is from about 7 to 12.

In some embodiments, the first polishing slurry composition furtherincludes about 0 to 5 parts by weight of a pH buffer, and about 0 to 10parts by weight of a surfactant. In some embodiments, the pH bufferincludes organic acid, such as citric acid, acetic acid, in an amount ofabout 1 to 3 parts by weight. In some embodiments, the surfactantincludes organic acid (e.g., citric acid, acetic acid) or alcohol (e.g.,ethanol), in an amount of about 1 to 3 parts by weight. In someembodiments, the pH buffer and the surfactant are optional, and can beomitted as needed.

Referring to FIG. 6, a second polishing operation P2 is performed with asecond polishing slurry composition, until the top surface of the firstdielectric layer 124 is exposed. In some embodiments, the secondpolishing operation P2 is performed by using the first dielectric layer124 as a polishing stop layer. In some embodiments, the second polishingoperation P2 is configured to polish a Ru-based material or the like byusing a nitride-based material as a polishing stop layer. In someembodiments, the oxide-based material is simultaneously removed duringthe second polishing operation P2.

In some embodiments, the second polishing slurry composition includesabout 0.1 to 10 parts by weight of a metal oxide, and about 0.1 to 10parts by weight of a chelator. In some embodiments, the metal oxideserves as an abrasive and includes cerium oxide (CeO₂), ceriumhydroxide, cerium nitride, cerium fluoride or cerium sulfide, in anamount of about 1 to 5 parts by weight. In some embodiments, thechelator serves as a polishing accelerator and includes a thiol compoundor a thiolether compound in an amount of about 1 to 5 parts by weight.

In some embodiments, an oxidant is not present in the second polishingslurry composition. Rather, the chelator including a thiol compound or athiolether compound is used instead. In some embodiments, due to thechemical inertness and high Mohs hardness of a transition metal (e.g.Ru), the polishing operation becomes difficult. However, most of theoxidizing agents cannot apply to such ceria-type slurry, because theseoxidizing agents would cause ceria abrasive particles to agglomerate.The lone pairs of thiolether groups of the chelator donate the electronsto form coordinate covalent bonds with empty orbits of Ru. Such covalentbonds, unlike metallic bonds, are directional. Strong bond energy willinduce electrons to redistribute and cluster at the S—Ru side, so thatRu—Ru bonds along the σ bond axis would be weakened (so-called “transeffect”). Specifically, after the thiolether groups of the chelator formcoordinate covalent bonds with Ru, the thiolether-Ru complex layeraround the top surface becomes easier to be removed due to thetrans-effect. Since the Ru atoms around the top surface lose bondingstrength with under-layer atoms, the Ru surface is able to be removed byabrasive abrasion.

In some embodiments, the chelator is represented by a formula ofR₁—S—R₂, wherein R₁ and R₂ each independently represent hydrogen,substituted or unsubstituted C₁-C₁₅ alkyl, substituted or unsubstitutedC₁-C₁₅ alkoxyl or substituted or unsubstituted C₆-C₃₀ aryl. In someembodiments, an alkyl group is a stronger electron pusher toward thecentral sulfur atom than hydrogen. Therefore, the central sulfur atombecomes more electron rich when the side group is an alkyl group ratherthan a hydrogen. Such sulfur atom has higher tendency to donate itselectrons and forms a coordinate covalent bond with empty orbits of Ru,and thus, the removal rate (RR) of the CMP process is accordinglyimproved.

In some embodiments, the second polishing slurry composition furtherincludes about 0.1 to 10 parts by weight of a pH adjustor. In someembodiments, the pH adjustor includes KOH or R₁—N—R₂, wherein R₁ and R₂each independently represent hydrogen, substituted or unsubstitutedC₁-C₁₅ alkyl, substituted or unsubstituted C₁-C₁₅ alkoxyl or substitutedor unsubstituted C₆-C₃₀ aryl, in an amount of about 1 to 5 parts byweight. In some embodiments, the pH value of the second polishing slurrycomposition is from about 7 to 12.

In some embodiments, the second polishing slurry composition furtherincludes about 0 to 5 parts by weight of a pH buffer, and about 0 to 10parts by weight of a surfactant. In some embodiments, the pH bufferincludes organic acid, such as citric acid, acetic acid, in an amount ofabout 1 to 3 parts by weight. In some embodiments, the surfactantincludes organic acid (e.g., citric acid, acetic acid) or alcohol (e.g.,ethanol), in an amount of about 1 to 3 parts by weight. In someembodiments, the pH buffer and the surfactant are optional, and can beomitted as needed.

Referring to FIG. 7, a third polishing operation P3 is performed with athird polishing slurry composition, until the top surfaces of thedielectric helmets 116 of the gate structures 117 are exposed. In someembodiments, the third polishing operation P3 is performed by using thedielectric helmets 116 and the zeroth dielectric layer 122 as polishingstop layers. In some embodiments, the third polishing operation P3 isconfigured to polish a Ru-based material or the like by using a mixedlayer of nitride-based and oxide-based materials as a polishing stoplayer. In some embodiments, the nitride-based material (or carbon-basedmaterial) is simultaneously removed during the third polishing operationP3.

In some embodiments, the third polishing slurry composition includesabout 0.1 to 10 parts by weight of a metal oxide, and about 0.1 to 10parts by weight of an oxidizer. In some embodiments, the metal oxideserves as an abrasive and includes SiO₂ in an amount of about 1 to 5parts by weight. In some embodiments, the oxidizer serves as a polishingaccelerator and includes H₂O₂, KIO₃, KIO₄, KClO₃, KClO₄ or a combinationthereof, in an amount of about 1 to 5 parts by weight.

In some embodiments, the third polishing slurry composition furtherincludes about 0.1 to 10 parts by weight of a pH adjustor. In someembodiments, the pH adjustor includes KOH or R₁—N—R₂, wherein R₁ and R₂each independently represent hydrogen, substituted or unsubstitutedC₁-C₁₅ alkyl, substituted or unsubstituted C₁-C₁₅ alkoxyl or substitutedor unsubstituted C₆-C₃₀ aryl, in an amount of about 1 to 5 parts byweight. In some embodiments, the pH value of the first polishing slurrycomposition is from about 7 to 12.

In some embodiments, the third polishing slurry composition furtherincludes about 0 to 5 parts by weight of a pH buffer, and about 0 to 10parts by weight of a surfactant. In some embodiments, the pH bufferincludes organic acid, such as citric acid, acetic acid, in an amount ofabout 1 to 3 parts by weight. In some embodiments, the surfactantincludes organic acid (e.g., citric acid, acetic acid) or alcohol (e.g.,ethanol), in an amount of about 1 to 3 parts by weight. In someembodiments, the pH buffer and the surfactant are optional, and can beomitted as needed.

Upon the first to third polishing operations P1 to P3, the remainingmetal layer 130 constitute contacts (or called “vias” in some examples)between the gate structures 117. A FinFET device of the disclosure isthus completed.

The above embodiments in which the chelator of the disclosure is notincluded in each of the first polishing slurry composition and the thirdpolishing slurry composition are provided for illustration purposes, andare not construed as limiting the present disclosure. In otherembodiments, each of the first polishing slurry composition and thethird polishing slurry composition can further include about 0.1 to 10parts by weight of a chelator. In some embodiments, the chelator servesas a polishing accelerator and includes a thiol compound or a thiolethercompound in an amount of about 1 to 5 parts by weight. In someembodiments, the chelator is represented by a formula of R₁—S—R₂,wherein R₁ and R₂ each independently represent hydrogen, substituted orunsubstituted C₁-C₁₅ alkyl, substituted or unsubstituted C₁-C₁₅ alkoxylor substituted or unsubstituted C₆-C₃₀ aryl.

FIG. 8 is a process flow of a method of polishing a metal layer inaccordance with some embodiments. Although the method is illustratedand/or described as a series of acts or events, it will be appreciatedthat the method is not limited to the illustrated ordering or acts.Thus, in some embodiments, the acts may be carried out in differentorders than illustrated, and/or may be carried out concurrently.Further, in some embodiments, the illustrated acts or events may besubdivided into multiple acts or events, which may be carried out atseparate times or concurrently with other acts or sub-acts. In someembodiments, some illustrated acts or events may be omitted, and otherun-illustrated acts or events may be included.

At act 202, a substrate is provided, and the substrate has two gatestructures and a metal stack between the gate structures, wherein eachof the gate structures has a gate electrode and a dielectric helmet overthe gate electrode. FIG. 1 illustrates a cross-sectional viewcorresponding to some embodiments of act 202.

At act 204, a first dielectric layer and a second dielectric layer aresequentially formed over the gate structures and the metal stack. FIG. 2illustrates a cross-sectional view corresponding to some embodiments ofact 204.

At act 206, an opening is formed to penetrate through the firstdielectric layer and the second dielectric layer and exposes the metalstack. FIG. 3 illustrates a cross-sectional view corresponding to someembodiments of act 206.

At act 208, a metal layer is formed over the second dielectric layer andfills in the opening, wherein the metal layer includes Ru. FIG. 4illustrates a cross-sectional view corresponding to some embodiments ofact 208.

At act 210, a first polishing operation is performed with a firstpolishing slurry composition until the second dielectric layer isexposed. FIG. 5 illustrates a cross-sectional view corresponding to someembodiments of act 210.

At act 212, a second polishing operation is performed with a secondpolishing slurry composition until the first dielectric layer isexposed. FIG. 6 illustrates a cross-sectional view corresponding to someembodiments of act 212.

At act 214, a third polishing operation is performed with a thirdpolishing slurry composition until the dielectric helmet is exposed.FIG. 7 illustrates a cross-sectional view corresponding to someembodiments of act 214.

FIG. 9 is a process flow of a method of polishing a metal layer inaccordance with alternative embodiments. Although the method isillustrated and/or described as a series of acts or events, it will beappreciated that the method is not limited to the illustrated orderingor acts. Thus, in some embodiments, the acts may be carried out indifferent orders than illustrated, and/or may be carried outconcurrently. Further, in some embodiments, the illustrated acts orevents may be subdivided into multiple acts or events, which may becarried out at separate times or concurrently with other acts orsub-acts. In some embodiments, some illustrated acts or events may beomitted, and other un-illustrated acts or events may be included.

At act 302, a substrate is provided, and the substrate has a polishingstop layer and a target metal layer formed thereon. FIG. 1 to FIG. 4illustrate cross-sectional views corresponding to some embodiments ofact 302.

At act 304, the target metal layer is polished with a CMP slurrycomposition until the polishing stop layer is exposed, wherein the CMPslurry composition includes a chelator, and the chelator includes athiol compound or a thiolether compound.

FIG. 6 illustrates a cross-sectional view corresponding to someembodiments of act 304. In some embodiments, as shown in FIG. 6, themetal layer 130 is polished, using the first dielectric layer 124 as apolishing stop layer, with a second polishing slurry compositionincluding CeO₂ particles and the above-mentioned chelator. In someembodiments, the first dielectric layer 124 includes a nitride-based orcarbon-based material such as SiN, SiCN, SiON, SiOCN, SiOC or SiC. Insome embodiments, the first dielectric layer 124 includes a silicon atomcontent of 20-70 at %, a nitrogen atom content of 0-60 at %, a carbonatom content of 0-50 at %, and an oxygen content of 0-60 at %. In thisexample, an oxidizer is not present in the CMP slurry composition.

FIG. 5 illustrates a cross-sectional view corresponding to alternativeembodiments of act 304. In some embodiments, as shown in FIG. 5, themetal layer 130 is polished, using the second dielectric layer 126 as apolishing stop layer, with a first polishing slurry compositionincluding TiO₂ particles, an oxidizer and the above-mentioned chelator.In some embodiments, the second dielectric layer 126 includes anoxide-based material such as SiO₂.

FIG. 7 illustrates a cross-sectional view corresponding to yetalternative embodiments of act 304. In some embodiments, as shown inFIG. 7, the metal layer 130 is polished, using the zeroth dielectriclayer 122 and dielectric helmets 116 as polishing stop layers, with athird polishing slurry composition including SiO₂ particles, an oxidizerand the above-mentioned chelator. In some embodiments, the zerothdielectric layer 122 includes an oxide-based material such as SiO₂, andthe dielectric helmets 116 include ZrO₂, SiN or silicon.

The transition metal element with low resistivity (such as ruthenium) ispromising for the next-generation via material. However, the chemicalinertness and high hardness make it difficult for Ru to integrate to aCMP process. In the disclosure, a thiol-containing orthiolether-containing chelator is added to a CMP slurry composition, soas to help boost the Ru removal rate and enable Ru to integrate to a vialoop.

In accordance with some embodiments of the present disclosure, a CMPslurry composition includes about 0.1 to 10 parts by weight of a metaloxide, and about 0.1 to 10 parts by weight of a chelator. The chelatorincludes a thiol compound or a thiolether compound.

In accordance with alternative embodiments of the present disclosure, amethod of polishing a metal layer includes the following operations. Asubstrate is provided, and the substrate has a polishing stop layer anda target metal layer formed thereon. The target metal layer is polishedwith a CMP slurry composition until the polishing stop layer is exposed,wherein the CMP slurry composition includes a chelator, and the chelatorincludes a thiol compound or a thiolether compound.

In accordance with yet alternative embodiments of the present disclosurea method of polishing a metal layer includes the following operations. Asubstrate is provided, and the substrate has two gate structures and ametal stack between the gate structures, wherein each of the gatestructures has a gate electrode and a dielectric helmet over the gateelectrode. A first dielectric layer and a second dielectric layer aresequentially formed over the gate structures and the metal stack. Anopening is formed to penetrate through the first dielectric layer andthe second dielectric layer and exposes the metal stack. A metal layeris formed over the second dielectric layer and fills in the opening,wherein the metal layer includes Ru. A first polishing operation isperformed with a first polishing slurry composition until the seconddielectric layer is exposed. A second polishing operation is performedwith a second polishing slurry composition until the first dielectriclayer is exposed. A third polishing operation is performed with a thirdpolishing slurry composition until the dielectric helmet is exposed.

The foregoing outlines features of several embodiments so that thoseskilled in the art may better understand the aspects of the presentdisclosure. Those skilled in the art should appreciate that they mayreadily use the present disclosure as a basis for designing or modifyingother processes and structures for carrying out the same purposes and/orachieving the same advantages of the embodiments introduced herein.Those skilled in the art should also realize that such equivalentconstructions do not depart from the spirit and scope of the presentdisclosure, and that they may make various changes, substitutions, andalterations herein without departing from the spirit and scope of thepresent disclosure.

What is claimed is:
 1. A CMP slurry composition, comprising: 0.1 to 10parts by weight of a metal oxide; and 0.1 to 10 parts by weight of achelator, comprising a thiol compound or a thiolether compound.
 2. TheCMP slurry composition of claim 1, wherein the chelator is representedby a formula of R₁—S—R₂, wherein R₁ and R₂ each independently representhydrogen, substituted or unsubstituted C₁-C₁₅ alkyl, substituted orunsubstituted C₁-C₁₅ alkoxyl or substituted or unsubstituted C₆-C₃₀aryl.
 3. The CMP slurry composition of claim 1, wherein the metal oxidecomprises cerium oxide, cerium hydroxide, cerium nitride, ceriumfluoride or cerium sulfide.
 4. The CMP slurry composition of claim 3,wherein an oxidizer is not present in the CMP slurry composition.
 5. TheCMP slurry composition of claim 1, wherein the metal oxide comprise TiO₂or SiO₂.
 6. The CMP slurry composition of claim 5, further comprising anoxidizer, wherein the oxidizer comprises H₂O₂, KIO₃, KIO₄, KClO₃, KClO₄or a combination thereof.
 7. The CMP slurry composition of claim 1,wherein the CMP slurry composition is for polishing RuCo, RuW, Ru, Mo,Rh or Ir.
 8. The CMP slurry composition of claim 1, wherein a pH valueof the CMP slurry composition is from 7 to
 12. 9. A method of polishinga metal layer, comprising: providing a substrate having a polishing stoplayer and a target metal layer formed thereon; and polishing the targetmetal layer with a CMP slurry composition until the polishing stop layeris exposed, wherein the CMP slurry composition comprises a chelator, andthe chelator comprises a thiol compound or a thiolether compound. 10.The method of claim 9, wherein the chelator is represented by a formulaof R₁—S—R₂, wherein R₁ and R₂ each independently represent hydrogen,substituted or unsubstituted C₁-C₁₅ alkyl, substituted or unsubstitutedC₁-C₁₅ alkoxyl or substituted or unsubstituted C₆-C₃₀ aryl.
 11. Themethod of claim 9, wherein the polishing stop layer comprises SiN, SiCN,SiON, SiOCN, SiOC or SiC.
 12. The method of claim 11, wherein the CMPslurry composition further comprises CeO₂ particles.
 13. The method ofclaim 12, wherein an oxidizer is not present in the CMP slurrycomposition.
 14. The method of claim 9, wherein the polishing stop layercomprises SiO₂.
 15. The method of claim 14, wherein the CMP slurrycomposition further comprises TiO₂ or SiO₂ particles.
 16. A method ofpolishing a metal layer, comprising: providing a substrate having twogate structures and a metal stack between the gate structures, whereineach of the gate structures has a gate electrode and a dielectric helmetover the gate electrode; sequentially forming a first dielectric layerand a second dielectric layer over the gate structures and the metalstack; forming an opening that penetrates through the first dielectriclayer and the second dielectric layer and exposes the metal stack;forming a metal layer over the second dielectric layer and filling inthe opening, wherein the metal layer comprises Ru; performing a firstpolishing operation with a first polishing slurry composition until thesecond dielectric layer is exposed; performing a second polishingoperation with a second polishing slurry composition until the firstdielectric layer is exposed; and performing a third polishing operationwith a third polishing slurry composition until the dielectric helmet isexposed.
 17. The method of claim 16, wherein the first polishing slurrycomposition comprises: TiO₂ particles; and an oxidant.
 18. The method ofclaim 16, wherein the second polishing slurry composition comprises:CeO₂ particles; and a chelator, comprising a thiol compound or athiolether compound.
 19. The method of claim 18, wherein an oxidizer isnot present in the second polishing slurry composition.
 20. The methodof claim 16, wherein the third polishing slurry composition comprises:SiO₂ particles; and an oxidant.